Tempress Diffusion Furnace Load Station, PC, 3 Axis Loader, Elevator, & WIP Rack - $25,800 - (Union City, CA)
Tempress 4 Stack Diffusion Furnace Cantilever Load Station with WEI Fully Automated Elevator Module (Please see second section for full details of WEI) and WIP Rack Includes:4 tube, 4 stack load station150mm compatible or smaller Stainless Steel Construction, Mirrored Finish Designed to accommodate: 2 Atmospheric load positions: Bottom 2 tubes2 LPCVD load positions: Top 2 tubes Hepa Exhaust Pull Lighting SystemWEI Automated Elevator Module & Loading System (see WEI below for details and pictures); Interfaces with Furnace (not supplied), cantilever module, WIP Rack. Designed to reach top module of (elevator) to avoid reach and left to right axis interface with furnace and WIP rack for load and unload of wafers. PC and PC StandWIP Rack: Designed for load and unload of wafer cassettes & to accommodate two each wafer transfer machines (not included). HEPA exhaust system. Due to the mirrored finish, some photos reflect background details of other equipment. Please let us know if you'd like additional pictures. WEIDiffusion Furnace Elevator System andWafer Carrier Transport System, Robotic, 3 Axis The system comprises a two, three or four short pin engagement system for engaging a wafer carrier for transporting semiconductor wafers by means of a three axis robotic transportation system for the purpose of processing semiconductor wafers in a factory. The multiple pin assembly allows a large reduction in travel distance with respect to prior art long rod engagement. This system is designed to raise and lower wafer cassettes onto Silicon Carbide Paddles or other transport on the diffusion furnace load station as well as interface with optional WIP (Work in Progress) staging system. Can load and unload both Teflon Cassettes and Quartz boats, interface with Mactronix wafer transport system and diffusion furnace. Triple axis on the robotic transportation system as well as ability to raise and lower wafers allows for multi faceted use. All Stainless steel top frame, steel sup…
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From ebay.com - 1 month ago